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FILEID="ALTO4104936"/></mets:div><mets:div ID="phys4104938" TYPE="page" LABEL="Seite 138" ORDER="138"><mets:fptr FILEID="IMG_DEFAULT_4104938"/><mets:fptr FILEID="IMG_THUMBS_4104938"/><mets:fptr FILEID="IMG_MIN_4104938"/><mets:fptr FILEID="IMG_MAX_4104938"/><mets:fptr FILEID="ALTO4104938"/></mets:div><mets:div ID="phys4104943" TYPE="page" LABEL="Seite 139" ORDER="139"><mets:fptr FILEID="IMG_DEFAULT_4104943"/><mets:fptr FILEID="IMG_THUMBS_4104943"/><mets:fptr FILEID="IMG_MIN_4104943"/><mets:fptr FILEID="IMG_MAX_4104943"/><mets:fptr FILEID="ALTO4104943"/></mets:div></mets:div></mets:structMap><mets:structMap TYPE="LOGICAL"><mets:div ID="log3554835" DMDID="md3554835" ADMID="amd3554835" TYPE="document" LABEL="Plasmapolymerisation von Hexamethyldisiloxan zur Abscheidung von quarzähnlichen Schichten bei gepulster Leistungszufuhr" ORDER="1" CONTENTIDS="urn:nbn:de:hbz:468-20020045"><mets:fptr FILEID="PDF_3554835"/><mets:fptr FILEID="IMG_TEASER_4104582"/><mets:div ID="log4104583" TYPE="section" LABEL="I. Inhaltsverzeichnis" ORDER="1"/><mets:div ID="log4104587" TYPE="section" LABEL="II. Symbolverzeichnis" ORDER="2"><mets:div ID="log4104588" TYPE="section" LABEL="Griechische Symbole" ORDER="1"/><mets:div ID="log4104590" TYPE="section" LABEL="Lateinische Symbole" ORDER="2"/><mets:div ID="log4104593" TYPE="section" LABEL="Physikalische Konstanten" ORDER="3"/></mets:div><mets:div ID="log4104595" TYPE="section" LABEL="1. Einleitung" ORDER="3"/><mets:div ID="log4104598" TYPE="section" LABEL="2. Grundlagen" ORDER="4"><mets:div ID="log4104599" TYPE="section" LABEL="2.1. Plasmaphysik" ORDER="1"/><mets:div ID="log4104601" TYPE="section" LABEL="2.1.1. Begriffe" ORDER="2"><mets:div ID="log4104602" TYPE="section" LABEL="(2-1)" ORDER="1"/><mets:div ID="log4104603" TYPE="section" LABEL="(2-2)" ORDER="2"/><mets:div ID="log4104604" TYPE="section" LABEL="(2-3)" ORDER="3"/><mets:div ID="log4104606" TYPE="section" LABEL="(2-4)" ORDER="4"/><mets:div ID="log4104607" TYPE="section" LABEL="(2-5)" ORDER="5"/><mets:div ID="log4104609" TYPE="section" LABEL="(2-6)" ORDER="6"/><mets:div ID="log4104610" TYPE="section" LABEL="(2-7)" ORDER="7"/></mets:div><mets:div ID="log4104611" TYPE="section" LABEL="2.1.2. Einteilung der Plasmen" ORDER="3"><mets:div ID="log4104612" TYPE="section" LABEL="Abb. 2-1 Klassifizierung von natürlichen und Laborplasmen anhand der Parameter Elektronendichte n..." ORDER="1"/><mets:div ID="log4104614" TYPE="section" LABEL="(2-8)" ORDER="2"/><mets:div ID="log4104615" TYPE="section" LABEL="Damit ergibt sich für die mittlere Geschwindigkeit (2-9)" ORDER="3"/><mets:div ID="log4104616" TYPE="section" LABEL="und die wahrscheinlichste Geschwindigkeit (dF(v) / dv = 0) . (2-10)" ORDER="4"/></mets:div><mets:div ID="log4104618" TYPE="section" LABEL="2.1.3. Glimmentladung" ORDER="4"><mets:div ID="log4104619" TYPE="section" LABEL="Abb. 2-2 Prinzipieller Aufbau einer Gleichspannungsentladung mit schematischer Darstellung der Pl..." ORDER="1"/><mets:div ID="log4104621" TYPE="section" LABEL="Abb. 2-3 Skizzierter Strom-Spannungsverlauf einer Gleichspannungsgasentladung: a) unselbständige ..." ORDER="2"/><mets:div ID="log4104623" TYPE="section" LABEL="(2-11)" ORDER="3"/><mets:div ID="log4104624" TYPE="section" LABEL="(2-12)" ORDER="4"><mets:div ID="log4104625" TYPE="section" LABEL="Abb. 2-4 Zündkurve nach Paschen für verschiedene Gase [Jan 92]" ORDER="1"/></mets:div><mets:div ID="log4104627" TYPE="section" LABEL="(2-13)" ORDER="5"/></mets:div><mets:div ID="log4104628" TYPE="section" LABEL="2.1.4. Plasmaerzeugung" ORDER="5"><mets:div ID="log4104629" TYPE="section" LABEL="Abb. 2-5 Vergleich der Druyvesteyn- und Maxwell-Boltzmann-Verteilungsfunktion" ORDER="1"/></mets:div><mets:div ID="log4104631" TYPE="section" LABEL="2.2. Plasmapolymerisation" ORDER="6"/><mets:div ID="log4104633" TYPE="section" LABEL="2.2.1. Prinzip" ORDER="7"><mets:div ID="log4104634" TYPE="section" LABEL="Abb. 2-6 Schematische Reaktionsabläufe bei der Polymerisation im Plasma" ORDER="1"/></mets:div><mets:div ID="log4104636" TYPE="section" LABEL="2.2.2. Parameter" ORDER="8"><mets:div ID="log4104638" TYPE="section" LABEL="(2-14)" ORDER="1"/><mets:div ID="log4104640" TYPE="section" LABEL="(2-15)" ORDER="2"/><mets:div ID="log4104641" TYPE="section" LABEL="(2-16)" ORDER="3"/><mets:div ID="log4104642" TYPE="section" LABEL="(2-17)" ORDER="4"/><mets:div ID="log4104644" TYPE="section" LABEL="(2-18)" ORDER="5"/><mets:div ID="log4104645" TYPE="section" LABEL="(2-19)" ORDER="6"/><mets:div ID="log4104646" TYPE="section" LABEL="(2-20)" ORDER="7"/></mets:div><mets:div ID="log4104647" TYPE="section" LABEL="2.2.3. Anwendungsbereiche" ORDER="9"/><mets:div ID="log4104649" TYPE="section" LABEL="2.2.4. Plasmapolymerisation von Siloxanen" ORDER="10"/><mets:div ID="log4104651" TYPE="section" LABEL="2.2.5. Hexamethyldisiloxan (HMDSO)" ORDER="11"><mets:div ID="log4104652" TYPE="section" LABEL="Abb. 2-7 Struktur, Bindungsenergien und Elektronegativität von HMDSO [Mor 87, Nin98]" ORDER="1"/></mets:div><mets:div ID="log4104654" TYPE="section" LABEL="2.2.6. Direkte und „remote“ Plasmapolymerisation" ORDER="12"/><mets:div ID="log4104655" TYPE="section" LABEL="2.2.7. Modellansätze in der Plasmapolymerisation" ORDER="13"><mets:div ID="log4104658" TYPE="section" LABEL="(2-21)" ORDER="1"/><mets:div ID="log4104660" TYPE="section" LABEL="i) Der Energietransport erfolgt hauptsächlich über angeregte Sauerstoffspezies und wird durch die..." ORDER="2"/><mets:div ID="log4104661" TYPE="section" LABEL="ii) Der relative Anteil an atomarem bzw. angeregtem Sauerstoff ist im untersuchten Bereich unabhä..." ORDER="3"/><mets:div ID="log4104662" TYPE="section" LABEL="iii) Da er nur ein Monomer verwendet, setzt er zur Vereinfachung die Molmasse des Monomers zu eins." ORDER="4"/><mets:div ID="log4104663" TYPE="section" LABEL="iv) Der Energietransport zum Substrat ist reziprok zum Abstand zur Plasmaquelle DQ." ORDER="5"/><mets:div ID="log4104664" TYPE="section" LABEL="(2-22)" ORDER="6"/><mets:div ID="log4104666" TYPE="section" LABEL="(2-23)" ORDER="7"/></mets:div><mets:div ID="log4104667" TYPE="section" LABEL="2.3. Zeitmodulierte Leistungszufuhr (PICVD)" ORDER="14"/><mets:div ID="log4104669" TYPE="section" LABEL="2.3.1. Einsatzmöglichkeiten" ORDER="15"><mets:div ID="log4104670" TYPE="section" LABEL="Abb. 2-8 Kluster- und Pulverbildung in Abhängigkeit von der Frequenz bei der Abscheidung von Sili..." ORDER="1"/><mets:div ID="log4104672" TYPE="section" LABEL=". (2-24)" ORDER="2"/></mets:div><mets:div ID="log4104674" TYPE="section" LABEL="2.3.2. Prinzip der zeitmodulierten Leistungszufuhr" ORDER="16"><mets:div ID="log4104675" TYPE="section" LABEL="Abb. 2-9 Konzentration zweier Teilchenarten im Plasma bei kontinuierlicher und gepulster Leistung..." ORDER="1"/><mets:div ID="log4104677" TYPE="section" LABEL="Tab. 2.1 Typische Lebensdauern und Energien von metastabilen Zuständen bei Argon- und Sauerstoffa..." ORDER="2"/></mets:div><mets:div ID="log4104679" TYPE="section" LABEL="2.3.3. Beispiel: Selektives Ätzen von Siliziumoxid" ORDER="17"><mets:div ID="log4104680" TYPE="section" LABEL="Abb. 2-10 Ätzselektivität von CHF3 auf Silizium und Siliziumoxid in Abhängigkeit von der Pulsläng..." ORDER="1"/></mets:div><mets:div ID="log4104681" TYPE="section" LABEL="2.3.4. Modellansätze" ORDER="18"/></mets:div><mets:div ID="log4104684" TYPE="section" LABEL="3. Instrumentierung" ORDER="5"><mets:div ID="log4104685" TYPE="section" LABEL="3.1. Beschichtungsanlage" ORDER="1"><mets:div ID="log4104686" TYPE="section" LABEL="Abb. 3-1 Foto der Plasmapolymerisationsanlage mit Pumpsystem (A), Mikrowellenquelle (B), Plasmapr..." ORDER="1"/></mets:div><mets:div ID="log4104688" TYPE="section" LABEL="3.1.1. Vakuumkammer" ORDER="2"><mets:div ID="log4104689" TYPE="section" LABEL="Abb. 3-2 Schematischer Aufbau der Plasmapolymerisationsanlage mit Mikrowellenquelle (links oben u..." ORDER="1"/></mets:div><mets:div ID="log4104691" TYPE="section" LABEL="3.1.2. Plasmagenerierung" ORDER="3"><mets:div ID="log4104692" TYPE="section" LABEL="Abb. 3-3 Querschnitt durch die Mikrowellenplasmaquelle SLAN1" ORDER="1"/></mets:div><mets:div ID="log4104694" TYPE="section" LABEL="3.1.3. Prozeßsteuerung" ORDER="4"><mets:div ID="log4104695" TYPE="section" LABEL="Abb. 3-4 Screenshot von der Benutzeroberfläche mit Soll- und Ist-Werten des Druckes, der Gasflüss..." ORDER="1"/></mets:div><mets:div ID="log4104698" TYPE="section" LABEL="3.2. In-situ Messungen" ORDER="5"/><mets:div ID="log4104700" TYPE="section" LABEL="3.2.1. Optische Schichtdickenmessung (MPM-16)" ORDER="6"><mets:div ID="log4104701" TYPE="section" LABEL="(3-1)" ORDER="1"/><mets:div ID="log4104703" TYPE="section" LABEL="(3-2)" ORDER="2"/></mets:div><mets:div ID="log4104704" TYPE="section" LABEL="3.2.2. Schwingquarzmessung" ORDER="7"><mets:div ID="log4104705" TYPE="section" LABEL="(3-3)" ORDER="1"/><mets:div ID="log4104707" TYPE="section" LABEL="(3-4)" ORDER="2"/><mets:div ID="log4104708" TYPE="section" LABEL="(3-5)" ORDER="3"/></mets:div><mets:div ID="log4104709" TYPE="section" LABEL="3.2.3. Temperaturmessungen" ORDER="8"/><mets:div ID="log4104711" TYPE="section" LABEL="3.2.4. Massenspektroskopie" ORDER="9"><mets:div ID="log4104713" TYPE="section" LABEL="(3-6)" ORDER="1"/><mets:div ID="log4104715" TYPE="section" LABEL="(3-7)" ORDER="2"><mets:div ID="log4104716" TYPE="section" LABEL="Abb. 3-5 Zeitliche Entwicklung der massenspektroskopische Signale bei 32 (O2), 40 (Ar) und 147 am..." ORDER="1"/><mets:div ID="log4104717" TYPE="section" LABEL="Abb. 3-6 Querschnitt durch die Eintrittsoptik eines PPM 421 mit Extraktionshaube, Eintrittslinse,..." ORDER="2"/><mets:div ID="log4104719" TYPE="section" LABEL="Abb. 3-7 Durch den Einsatz im beschichtendem Plasma verunreinigt Molybdängitter aus dem Ionisatio..." ORDER="3"/></mets:div></mets:div><mets:div ID="log4104721" TYPE="section" LABEL="3.2.5. Bias-Messungen" ORDER="10"/><mets:div ID="log4104723" TYPE="section" LABEL="3.3. Ex-situ Charakterisierung" ORDER="11"/><mets:div ID="log4104724" TYPE="section" LABEL="3.3.1. Optische Schichtdickenmessung" ORDER="12"/><mets:div ID="log4104725" TYPE="section" LABEL="3.3.2. Mechanische Schichtdickenmessung" ORDER="13"/><mets:div ID="log4104727" TYPE="section" LABEL="3.3.3. Mechanische Schichtcharakterisierung" ORDER="14"/><mets:div ID="log4104729" TYPE="section" LABEL="3.3.4. Rasterelektronen- und Rasterkraftmikroskopie" ORDER="15"><mets:div ID="log4104730" TYPE="section" LABEL="Abb. 3-8 Meßaufbau eines Rasterkraftmikroskops mit Hebelarm, Laser, vier-Sektoren-Detektor und St..." ORDER="1"/><mets:div ID="log4104732" TYPE="section" LABEL="(3-8)" ORDER="2"/></mets:div><mets:div ID="log4104733" TYPE="section" LABEL="3.3.5. Fouriertransformations-Infrarot-Spektroskopie (FTIR)" ORDER="16"/><mets:div ID="log4104736" TYPE="section" LABEL="3.3.6. Röntgenphotoelektronenspektroskopie (XPS)" ORDER="17"/></mets:div><mets:div ID="log4104738" TYPE="section" LABEL="4. Experimentelle Ergebnisse" ORDER="6"><mets:div ID="log4104739" TYPE="section" LABEL="4.1. Parameterbereich" ORDER="1"><mets:div ID="log4104741" TYPE="section" LABEL="Abb. 4-1 Depositionsrate (in-situ) in Abhängigkeit von a) der Bias-Spannung und b) der Beschichtu..." ORDER="1"/><mets:div ID="log4104743" TYPE="section" LABEL="Abb. 4-2 Depositionsrate D (zwei Meßreihen: schwarz bzw. weiss) in Abhängigkeit vom Argonfluß FAr..." ORDER="2"/><mets:div ID="log4104745" TYPE="section" LABEL="Abb. 4-3 Eingekoppelte Leistung Peff und Depositionsrate D in Abhängigkeit von Tastverhältnis a b..." ORDER="3"/><mets:div ID="log4104747" TYPE="section" LABEL="Tab. 4.1 Untersuchter Parameterbereich, zusätzlich geben die Werte in Klammern die stichprobenart..." ORDER="4"/></mets:div><mets:div ID="log4104749" TYPE="section" LABEL="4.2. Abscheideverhalten" ORDER="2"/><mets:div ID="log4104750" TYPE="section" LABEL="4.2.1. Depositionsrate und Schichtqualität" ORDER="3"><mets:div ID="log4104751" TYPE="section" LABEL="Abb. 4-4 Schichtdicken mit Schwankungsbreite entlang der Probe, normiert auf die cw-Depositionsra..." ORDER="1"/><mets:div ID="log4104753" TYPE="section" LABEL="Abb. 4-5 Räumliche Verteilung der Depositionsrate D entlang der Probe, normiert auf den jeweilige..." ORDER="2"/><mets:div ID="log4104755" TYPE="section" LABEL="Abb. 4-6 Depositionsrate D bei variabler Frequenz (in-situ Versuchsreihe), auf den cw-Wert von 46..." ORDER="3"/><mets:div ID="log4104757" TYPE="section" LABEL="Abb. 4-7 Vergleich der Depositionsraten bei kontinuierlicher und gepulster Leistungszufuhr (cw un..." ORDER="4"/><mets:div ID="log4104759" TYPE="section" LABEL="Abb. 4-8 Relative Depositionsrate D mit Schwankungsbreite (a) und ihre räumliche Verteilung entla..." ORDER="5"/></mets:div><mets:div ID="log4104760" TYPE="section" LABEL="4.2.2. Temperaturmessungen" ORDER="4"><mets:div ID="log4104761" TYPE="section" LABEL="Abb. 4-9 Endtemperatur und Temperaturerhöhung in Substratnähe jeweils relativ zum cw-Wert mit Feh..." ORDER="1"/><mets:div ID="log4104763" TYPE="section" LABEL="Abb. 4-10 Vergleich der Temperaturerhöhung bei in-situ Kurzzeitmessungen ohne (a) und ex- situ La..." ORDER="2"/><mets:div ID="log4104765" TYPE="section" LABEL="Abb. 4-11 Explizite und extrapolierte (gestrichelt) Temperaturanstieg in Substratnähe bei variabl..." ORDER="3"/></mets:div><mets:div ID="log4104767" TYPE="section" LABEL="4.3. Gasphasenzusammensetzung" ORDER="5"/><mets:div ID="log4104768" TYPE="section" LABEL="4.3.1. Massenspektrum" ORDER="6"><mets:div ID="log4104769" TYPE="section" LABEL="Abb. 4-12 HMDSO-Spektrum bei p = 50 Pa und 20 sccm HMDSO mit HMDSO-Fragmenten (blau) und Restgase..." ORDER="1"/></mets:div><mets:div ID="log4104771" TYPE="section" LABEL="4.3.2. Messungen bei variablem Sauerstofffluß" ORDER="7"><mets:div ID="log4104772" TYPE="section" LABEL="Abb. 4-13 Relative Konzentrationen der Oxidationsprodukte, des Sauerstoffs (a) und der Monomerfra..." ORDER="1"/><mets:div ID="log4104774" TYPE="section" LABEL="Abb. 4-14 Relative Konzentrationen der Oxidationsprodukte, des Sauerstoffs (a) und der Monomerfra..." ORDER="2"/><mets:div ID="log4104776" TYPE="section" LABEL="Abb. 4-15 Vergleich der relativen Konzentration der Massenlinie bei 133 amu (a) bzw. relativ zum ..." ORDER="3"/><mets:div ID="log4104778" TYPE="section" LABEL="Abb. 4-16 Relative Konzentrationen der Oxidationsprodukte und Monomerfragmente bei p = 20 Pa (P =..." ORDER="4"/></mets:div><mets:div ID="log4104780" TYPE="section" LABEL="4.3.3. Messungen bei variabler Frequenz" ORDER="8"><mets:div ID="log4104781" TYPE="section" LABEL="Abb. 4-17 Relative Konzentrationen der Oxidationsprodukte und des Sauerstoffs (a) bzw. relativ zu..." ORDER="1"/><mets:div ID="log4104783" TYPE="section" LABEL="Abb. 4-18 Relative Konzentration der Monomerfragmente (a) bzw. relativ vom Hauptfragment bei 147 ..." ORDER="2"/><mets:div ID="log4104785" TYPE="section" LABEL="Abb. 4-19 Verhältnis der relativen Konzentrationen der Oxidationsprodukte (a) und Monomerfragment..." ORDER="3"/></mets:div><mets:div ID="log4104787" TYPE="section" LABEL="4.4. Mikroskopische Homogenität" ORDER="9"><mets:div ID="log4104788" TYPE="section" LABEL="Abb. 4-20 REM-Graphen der Oberfläche der abgeschiedenen Schichten unter einem Winkel von 45° bei ..." ORDER="1"/><mets:div ID="log4104790" TYPE="section" LABEL="Abb. 4-21 AFM-Untersuchungen der Oberfläche der abgeschiedenen Schichten (p = 50 Pa, P = 2 kW, a ..." ORDER="2"/><mets:div ID="log4104792" TYPE="section" LABEL="Abb. 4-22 REM-Graphen der Oberfläche der abgeschiedenen Schichten unter einem Winkel von 45° (obe..." ORDER="3"/></mets:div><mets:div ID="log4104794" TYPE="section" LABEL="4.5. Schichtzusammensetzung" ORDER="10"><mets:div ID="log4104795" TYPE="section" LABEL="Abb. 4-23 Ausschnitt aus FTIR-Spektren von abgeschiedenen Schichten bei unterschiedlichen Frequen..." ORDER="1"/><mets:div ID="log4104797" TYPE="section" LABEL="Abb. 4-24 XPS-Messungen Daten siehe Abb. 4-23 bzw. p = 50 Pa, P = 2 kW, cw, 10 - 100 sccm Ar, 90 ..." ORDER="2"/></mets:div></mets:div><mets:div ID="log4104799" TYPE="section" LABEL="5. Modellierung des Abscheideverhaltens" ORDER="7"><mets:div ID="log4104800" TYPE="section" LABEL="5.1. Mikroskopisches Modell" ORDER="1"/><mets:div ID="log4104802" TYPE="section" LABEL="5.1.1. Korrelationen in der Gasphase" ORDER="2"><mets:div ID="log4104803" TYPE="section" LABEL="Tab. 5.1 Korrelationenkoeffizienten r zwischen den einzelnen Massenlinien bei variablem Sauerstof..." ORDER="1"/><mets:div ID="log4104805" TYPE="section" LABEL="Tab. 5.2 Korrelationenkoeffizienten r zwischen den einzelnen Massenlinien bei variablem Sauerstof..." ORDER="2"/><mets:div ID="log4104807" TYPE="section" LABEL="I133 = I133_Ox + I133_M (5-1)" ORDER="3"/></mets:div><mets:div ID="log4104808" TYPE="section" LABEL="5.1.2. Startprozeß im Argonplasma" ORDER="3"><mets:div ID="log4104809" TYPE="section" LABEL="e + R-Si-(CH3)3 =&gt; 2 e + R-Si+*-(CH3)3 =&gt; 2 e + CH3* + R-Si+-(CH3)2, (5-2)" ORDER="1"/><mets:div ID="log4104811" TYPE="section" LABEL="R-Si(CH3)2-O-Si(CH3)3 (5-4)" ORDER="2"/></mets:div><mets:div ID="log4104813" TYPE="section" LABEL="5.1.3. Startprozeß im Sauerstoffplasma" ORDER="4"><mets:div ID="log4104814" TYPE="section" LABEL="(CH3)3-Si-O-Si+-(CH3)2 + O =&gt; (CH3)3-Si-O-Si(CH3)2-O+ (5-5)" ORDER="1"/><mets:div ID="log4104816" TYPE="section" LABEL="(CH3)3-Si-O-Si(CH3)2-O+ =&gt; (CH3)3-Si-O-Si(CH3)=O + CH3+ (5-6)" ORDER="2"/><mets:div ID="log4104817" TYPE="section" LABEL="(CH3)3-Si-O-Si-(CH3)3 + O-O =&gt; (CH3)3-Si-O-Si(CH3)=O + CH3OH + CH2 (5-7)" ORDER="3"/><mets:div ID="log4104818" TYPE="section" LABEL="(CH3)3-Si-O-Si-(CH3)3 + O =&gt; (CH3)3-Si-O-Si(CH3)=O + 2 CH3 (5-8)" ORDER="4"/><mets:div ID="log4104820" TYPE="section" LABEL="(CH3)3-Si-O-Si(CH3)=O &lt;=&gt; (CH3)3-Si-O-Si(=CH2)OH (5-9)" ORDER="5"/><mets:div ID="log4104821" TYPE="section" LABEL="(CH3)3-Si-O-Si-(CH3)=O + e- =&gt; (CH3)3-Si-O-Si+=O + CH3- (5-10)" ORDER="6"/></mets:div><mets:div ID="log4104822" TYPE="section" LABEL="5.1.4. Weiteres Wachstum in der Gasphase" ORDER="5"><mets:div ID="log4104823" TYPE="section" LABEL="R1-Si-OH + R2-Si-OH =&gt; R1-Si-O-Si-R2 + H2O (5-11)" ORDER="1"/><mets:div ID="log4104825" TYPE="section" LABEL="(CH3)3-Si-O-Si(CH3)=O, 148 amu (5-12)" ORDER="2"/></mets:div><mets:div ID="log4104826" TYPE="section" LABEL="5.2. Empirisches Modell" ORDER="6"/><mets:div ID="log4104828" TYPE="section" LABEL="5.2.1. Annahmen" ORDER="7"><mets:div ID="log4104829" TYPE="section" LABEL="i) Der Monomerverbrauch bzw. -umsatz US ist proportional zur Abnahme der relativen Intensität der..." ORDER="1"/><mets:div ID="log4104830" TYPE="section" LABEL="ii) Das Verhältnis der Monomerfragmente bei 133 und 147 amu (I133_M und I147) zueinander ist währ..." ORDER="2"/><mets:div ID="log4104831" TYPE="section" LABEL="iii) HMDSO reagiert nur in Gegenwart von Sauerstoff(radikalen). Ohne Sauerstoff wird kein Monomer..." ORDER="3"/><mets:div ID="log4104833" TYPE="section" LABEL="iv) Bei der obigen Reaktion können je nach Randbedingungen sowohl „precursor“ entstehen, die zur ..." ORDER="4"/><mets:div ID="log4104834" TYPE="section" LABEL="ICOx = ICO + ICO2 (5-13)" ORDER="5"><mets:div ID="log4104836" TYPE="section" LABEL="Abb. 5-1 Vergleich des Anstieges der flüchtigen Oxidationsprodukte mit dem linear ansteigendem Mo..." ORDER="1"/><mets:div ID="log4104838" TYPE="section" LABEL="Abb. 5-2 Veränderung der leicht flüchtigen Oxidationsprodukte (1. Ableitung nach FO2) bei p = 20 ..." ORDER="2"/></mets:div><mets:div ID="log4104840" TYPE="section" LABEL="v) Bei der Oxidation eines Monomermoleküls kommt es entweder sofort zur weiteren Oxidation des Re..." ORDER="6"/><mets:div ID="log4104842" TYPE="section" LABEL="vi) Die relative Konzentration der stabilen „precursor“ ist unterhalb von k = 2 sehr klein gegenü..." ORDER="7"/><mets:div ID="log4104843" TYPE="section" LABEL="vii) Es kommt erst ab einer gewissen frequenzabhängigen Sättigung an leicht flüchtigen Oxidations..." ORDER="8"/></mets:div><mets:div ID="log4104844" TYPE="section" LABEL="5.2.2. Modellierung" ORDER="8"><mets:div ID="log4104845" TYPE="section" LABEL="US(k) = I147(k=0) - I147(k) ~ FO2 (5-14)" ORDER="1"/><mets:div ID="log4104847" TYPE="section" LABEL="(5-15)" ORDER="2"><mets:div ID="log4104848" TYPE="section" LABEL="Abb. 5-3 Monomerumsatz in Abhängigkeit von Sauerstofffluß FO2 bei p = 20 Pa und 30 sccm HMDSO (a)..." ORDER="1"/></mets:div><mets:div ID="log4104850" TYPE="section" LABEL="Iprec := I133_Ox = I133 - I133_M = I133 - M • I147 (5-16)" ORDER="3"/><mets:div ID="log4104851" TYPE="section" LABEL="D ~ Iprec (5-17)" ORDER="4"><mets:div ID="log4104852" TYPE="section" LABEL="Abb. 5-4 Aufteilung der normierten relativen Konzentration I133 in Monomer- (M*I133) und „precurs..." ORDER="1"/></mets:div><mets:div ID="log4104854" TYPE="section" LABEL="(D ~) Iprec ~ IO2 ~ FO2_MS (5-18)" ORDER="5"><mets:div ID="log4104855" TYPE="section" LABEL="Abb. 5-5 Vergleich des massenspektroskopisch gemessenen Sauerstoffflußes FO2_MS mit der relativen..." ORDER="1"/><mets:div ID="log4104857" TYPE="section" LABEL="Abb. 5-6 Linearer Anstieg des normierten, massenspektroskopisch gemessenen Sauerstoffflusses FO2_..." ORDER="2"/><mets:div ID="log4104859" TYPE="section" LABEL="Abb. 5-7 Vergleich der relativen „precursor“-Konzentration mit dem gemessenen Sauerstofffluß (P =..." ORDER="3"/></mets:div></mets:div><mets:div ID="log4104861" TYPE="section" LABEL="5.2.3. Vergleich mit anderen Modellen" ORDER="9"><mets:div ID="log4104862" TYPE="section" LABEL="mit (5-19)" ORDER="1"><mets:div ID="log4104863" TYPE="section" LABEL="Abb. 5-8 Theoretischer Verlauf des Monomerumsatzes USB in Abhängigkeit von remote Komposit-Parame..." ORDER="1"/></mets:div><mets:div ID="log4104865" TYPE="section" LABEL="(5-20)" ORDER="2"/><mets:div ID="log4104866" TYPE="section" LABEL="(5-21)" ORDER="3"/><mets:div ID="log4104868" TYPE="section" LABEL="(5-22)" ORDER="4"/><mets:div ID="log4104869" TYPE="section" LABEL="USB ~ D ~ IO2, (5-23)" ORDER="5"/></mets:div><mets:div ID="log4104870" TYPE="section" LABEL="5.2.4. Zusammenfassung" ORDER="10"/></mets:div><mets:div ID="log4104872" TYPE="section" LABEL="6. Gepulste Leistungszufuhr" ORDER="8"><mets:div ID="log4104873" TYPE="section" LABEL="6.1. Gasphasenzusammensetzung" ORDER="1"/><mets:div ID="log4104875" TYPE="section" LABEL="6.1.1. Messungen ohne Monomer" ORDER="2"><mets:div ID="log4104876" TYPE="section" LABEL="Abb. 6-1 Zeitlich gemittelte Elektronendichte im Zentrum der Plasmaquelle (P = 1 kW, a = 50%, p =..." ORDER="1"/><mets:div ID="log4104878" TYPE="section" LABEL="Abb. 6-2 Atomare Sauerstoffkonzentration im Sauerstoffplasma (p = 50 Pa, P = 1 kW, a = 50%, 50 sc..." ORDER="2"/></mets:div><mets:div ID="log4104880" TYPE="section" LABEL="6.1.2. Messungen mit Monomer" ORDER="3"><mets:div ID="log4104881" TYPE="section" LABEL="Abb. 6-3 Depositionsrate D, massenspektroskopisch gemessener „precursor“- und Sauerstofffluß Ipre..." ORDER="1"/><mets:div ID="log4104884" TYPE="section" LABEL="Abb. 6-4 Depositionsrate D, massenspektroskopisch gemessener „precursor“- und Sauerstofffluß Ipre..." ORDER="2"/></mets:div><mets:div ID="log4104887" TYPE="section" LABEL="6.2. Schichtabscheidung" ORDER="4"/><mets:div ID="log4104889" TYPE="section" LABEL="6.2.1. Makroskopische Homogenität" ORDER="5"/><mets:div ID="log4104890" TYPE="section" LABEL="6.2.2. Mikroskopische Oberflächenrauhigkeit" ORDER="6"/><mets:div ID="log4104893" TYPE="section" LABEL="6.2.3. Vor- und Nachteile der gepulsten Leistungszufuhr" ORDER="7"/></mets:div><mets:div ID="log4104895" TYPE="section" LABEL="7. Zusammenfassung und Ausblick" ORDER="9"/><mets:div ID="log4104899" TYPE="section" LABEL="8. Danksagung" ORDER="10"/><mets:div ID="log4104902" TYPE="section" LABEL="9. Literaturverzeichnis" ORDER="11"/><mets:div ID="log4104913" TYPE="section" LABEL="10. Anhang" ORDER="12"><mets:div ID="log4104914" TYPE="section" LABEL="10.1. Statistische Begriffe" ORDER="1"><mets:div ID="log4104915" TYPE="section" LABEL="(10-1)" ORDER="1"/><mets:div ID="log4104917" TYPE="section" LABEL="sx, sy zugehörige Standartabweichung und (10-2)" ORDER="2"/></mets:div><mets:div ID="log4104918" TYPE="section" LABEL="10.2. Meßparameter" ORDER="2"/><mets:div ID="log4104920" TYPE="section" LABEL="10.2.1. Massenspektren (PPM)" ORDER="3"><mets:div ID="log4104921" TYPE="section" LABEL="Tab. 10.1 Parameter im TuneUp-Menu bei Messungen im Neutralmodus mit eingeschaltetem Filament, di..." ORDER="1"/></mets:div><mets:div ID="log4104922" TYPE="section" LABEL="10.2.2. FTIR-Spektrometer" ORDER="4"><mets:div ID="log4104923" TYPE="section" LABEL="Tab. 10.2 Parameter bei Reflexions-Absorptionsmessungen" ORDER="1"/></mets:div><mets:div ID="log4104925" TYPE="section" LABEL="10.2.3. Oberflächenuntersuchungen (REM)" ORDER="5"><mets:div ID="log4104926" TYPE="section" LABEL="Tab. 10.3 Parameter bei rasterelektronischen Untersuchungen der goldbeschichteten Probenoberfläch..." ORDER="1"/></mets:div><mets:div ID="log4104927" TYPE="section" LABEL="10.2.4. Schichtdickenmessungen" ORDER="6"><mets:div ID="log4104928" TYPE="section" LABEL="Tab. 10.4 Parameter bei der optischen Aufsichtmessung der Schichtdicke, in den Klammern stehen ge..." ORDER="1"/></mets:div><mets:div ID="log4104930" TYPE="section" LABEL="10.3. Kalibrierung" ORDER="7"/><mets:div ID="log4104931" TYPE="section" LABEL="10.3.1. Monomerfluß" ORDER="8"><mets:div ID="log4104932" TYPE="section" LABEL="Abb. 10-1 Monomerfluß FHMDSO in Abhängigkeit von der Nadelventilstellung bei einem HMDSO-Dampfdru..." ORDER="1"/></mets:div><mets:div ID="log4104933" TYPE="section" LABEL="10.3.2. Massenspektren (Sauerstoff)" ORDER="9"><mets:div ID="log4104934" TYPE="section" LABEL="IO2 ~ FO2 (10-3)" ORDER="1"><mets:div ID="log4104935" TYPE="section" LABEL="Abb. 10-2 Massenspektroskopisch gemessenes Sauerstoffsignal bei variablem Sauerstofffluß im Vergl..." ORDER="1"/></mets:div></mets:div><mets:div ID="log4104937" TYPE="section" LABEL="10.4. Bibliotheken" ORDER="10"/><mets:div ID="log4104939" TYPE="section" LABEL="10.4.1. Massenlinien" ORDER="11"><mets:div ID="log4104940" TYPE="section" LABEL="Tab. 10.5 Übersicht über die intensiven Massenlinien im reinem HMDSO-Spektrum bei einer Ionisatio..." ORDER="1"/></mets:div><mets:div ID="log4104941" TYPE="section" LABEL="10.4.2. Infrarotspektrum" ORDER="12"><mets:div ID="log4104942" TYPE="section" LABEL="Tab. 10.6 Infrarot-Schwingungsbanden der abgeschiedenen siliziumoxydartigen Schichten" ORDER="1"/></mets:div></mets:div></mets:div></mets:structMap><mets:structLink><mets:smLink xlink:from="log3554835" xlink:to="physroot"/><mets:smLink xlink:from="log3554835" xlink:to="phys4104582"/><mets:smLink xlink:from="log4104583" xlink:to="phys4104584"/><mets:smLink xlink:from="log4104583" xlink:to="phys4104585"/><mets:smLink xlink:from="log4104583" xlink:to="phys4104586"/><mets:smLink xlink:from="log4104587" xlink:to="phys4104589"/><mets:smLink xlink:from="log4104587" xlink:to="phys4104591"/><mets:smLink xlink:from="log4104587" xlink:to="phys4104592"/><mets:smLink xlink:from="log4104587" xlink:to="phys4104594"/><mets:smLink xlink:from="log4104588" xlink:to="phys4104589"/><mets:smLink xlink:from="log4104590" xlink:to="phys4104591"/><mets:smLink xlink:from="log4104590" xlink:to="phys4104592"/><mets:smLink 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