Development of the MCM-D technique for pixel detector modules / Christian Grah. Wuppertal : Fachbereich Physik, Berg. Univ., 2005
Inhalt
- Contents
- Übersicht
- Abstract
- 1 Introduction
- 2 The Atlas Experiment at the Lhc
- 2.1 The Standard Model of High Energy Physics
- 2.2 Lhc -- Physics at the TeV Scale
- 2.3 The Atlas Detector
- 3 Pixel Detectors for High Energy Physics Applications
- 4 MCM--D Technique
- 4.1 Standard Solution: Flex--Hybrid Approach
- 4.2 The Multi Chip Module--Deposited Technique
- 4.3 Comparison of the Solutions
- 4.4 Interconnection Technologies
- 5 Experience with the MCM--D Technique
- 5.1 Achievements in Developing MCM--D Modules for hep Applications
- 5.2 First Prototypes using MCM--D Technique
- 5.3 Integrated Resistors in Thin Film Layers
- 5.4 Estimation of Yield Expectation
- 5.5 High Voltage Isolation Test
- 6 The MCM--D Design for Atlas
- 6.1 Elements of the Prototype 2.0 Sensor Wafers
- 6.2 Design Layer Description
- 6.3 Design Rules
- 6.4 MCM--D Single Chips
- 6.5 MCM--D Module
- 6.6 Process Monitoring
- 7 The MCM--D Process
- 7.1 Process Flow
- 7.2 BCB Processing
- 7.2.1 Basic Properties of BCB
- 7.2.2 BCB Deposition and Structuring
- 7.2.3 Repair Options during BCB Processing
- 7.2.4 Comment on BCB Processing
- 7.3 Cu Electroplating
- 7.4 Test Measurements on Wafer Level
- 7.5 Assembly Steps
- 7.6 Attachment of a Flexible Printed Circuit to MCM--D Modules
- 8 Production and Optimization of MCM--D Prototypes
- 9 Performance of Pixel Detector Prototypes in MCM--D Technique
- 9.1 Overview of MCM--D Prototype Production
- 9.2 Single Chip Hybrids
- 9.3 Irradiation of a MCM--D Single Chip
- 9.4 MCM--D Module
- 10 Test Beam Measurements
- 11 Aspect of MCM--D Processing
- 11.1 Yield Aspects of the MCM--D Production
- 11.2 Areas of Possible Optimizations
- 11.3 Further Upgrading of MCM--D
- Summary
- A Overview of processed MCMD3 Runs at Izm
- B Schematic View of Atlas Pixel Test Setup
- List of Figures
- List of Tables
- Bibliography
- Glossary
- Description of Acronyms
- Acknowledgements