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Spatial atomic layer deposition of electrically (non-)conductive gas diffusion barriers / von M.Sc. Lukas Hoffmann. Wuppertal, 23.04.2018
Content
List of Figures
List of Tables
Introduction
Physical fundamentals
Spatial atomic layer deposition
Conventional atomic layer deposition
Plasma enhanced atomic layer deposition
Gas kinetics
Gas diffusion barriers
Permeation
Temperature-dependent permeation
Time-dependent permeation
Definition: Water vapor transmission rate
Permeation through defects
Solar cells
Perovskite solar cells
Solar cell characteristics
Atomic layer deposition systems and barrier characterization methods
State of the Art: Atmospheric pressure spatial ALD systems
Atmospheric pressure plasma batch ALD system
Atmospheric pressure spatial ALD system
Simulation of the temperature distribution
Simulation of the spatial precursor separation
Dielectric barrier discharge plasma sources
Ozone concentration generated by the Ar/O2 plasma
Optical Ca test
Rutherford Backscattering Spectrometry / Nuclear reaction analysis
Al2O3-based gas diffusion barriers by atmospheric pressure ALD
Batch-based plasma ALD at atmospheric pressure
Direct and remote position
ALD film growth
Barrier properties
Optical and mechanical properties
Spatial atmospheric pressure ALD
ALD film growth
Barrier properties
SnOx-based gas diffusion barriers by spatial atmospheric pressure ALD
SnOx growth
SnOx film properties
Electrical conductivity
Barrier properties
Application of electrically conductive barriers in perovskite solar cells
Fabrication of perovskite solar cells
Characterization of perovskite solar cells
Dependence of deposition temperature on encapsulation
On the deposition speed of spatial ALD
Experimental Data
Influence of the substrate velocity on the ALD growth of Al2O3
Influence of the substrate velocity on the ALD growth of SnOx
Dependence of deposition speed on barrier properties
Simulation of ALD growth
Simulating the surface coverage
Model and assumption
Analysis of the substrate coverage
Validation of simulation and experiment
Conclusion
Appendix
Double-coating in water-based spatial ALD
Al2O3/Bectron multilayer barrier films
Further details on perovskite solar cells
Implementation of the simulations