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Startproze\u00df im Sauerstoffplasma"},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104815"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104814","@type":"sc:Range","label":"(CH3)3-Si-O-Si+-(CH3)2 + O => (CH3)3-Si-O-Si(CH3)2-O+ (5-5)"},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104819"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104818","@type":"sc:Range","label":"(CH3)3-Si-O-Si-(CH3)3 + O => (CH3)3-Si-O-Si(CH3)=O + 2 CH3 (5-8)"},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104824"],"ranges":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104823","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104825"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104822","@type":"sc:Range","label":"5.1.4. Weiteres Wachstum in der Gasphase"},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104824"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104823","@type":"sc:Range","label":"R1-Si-OH + R2-Si-OH => R1-Si-O-Si-R2 + H2O (5-11)"},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104827"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104826","@type":"sc:Range","label":"5.2. 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Annahmen"},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104832"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104831","@type":"sc:Range","label":"iii) HMDSO reagiert nur in Gegenwart von Sauerstoff(radikalen). Ohne Sauerstoff wird kein Monomer..."},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104835","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104837","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104839"],"ranges":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104836","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104838"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104834","@type":"sc:Range","label":"ICOx = ICO + ICO2 (5-13)"},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104837"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104836","@type":"sc:Range","label":"Abb. 5-1 Vergleich des Anstieges der fl\u00fcchtigen Oxidationsprodukte mit dem linear ansteigendem Mo..."},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104839"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104838","@type":"sc:Range","label":"Abb. 5-2 Ver\u00e4nderung der leicht fl\u00fcchtigen Oxidationsprodukte (1. Ableitung nach FO2) bei p = 20 ..."},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104841"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104840","@type":"sc:Range","label":"v) Bei der Oxidation eines Monomermolek\u00fcls kommt es entweder sofort zur weiteren Oxidation des Re..."},{"canvases":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104846","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104849","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104853","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104856","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104858","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/canvas/4104860"],"ranges":["https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104845","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104847","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104850","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104851","https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104854"],"@id":"https://elekpub.bib.uni-wuppertal.de/i3f/v20/3554835/range/4104844","@type":"sc:Range","label":"5.2.2. 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